Fundamentals of Microfabrication Condition:Very Good Publisher: aperture

Publisher: aperture

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Fundamentals of Microfabrication Condition:Very Good Publisher: apertureFundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also